Troubleshooting Slow Heat-Up in a Mica Heater System

https://thermal-technology-center.inkharbory.com/posts/how-to-evaluate-thermal-uniformity-when-selecting-a-wafer-heater

In heated plates, a mica heater must deliver heat in a controlled way. It uses a resistive heating circuit supported and insulated by mica. One useful trait is high-temperature capability. Still, mechanical stress can change the result